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Abstract

Elongated Au nanoparticles (NPs) embedded in silica matrix were fabricated by 100 MeV Ag ion irradiation of 3 MeV Au ion implanted SiO2/Si(100) substrates, annealed at 1050 o C. Electron-beam-induced shape evolution of elongated Au NPs embedded in SiO2 has been studied by high resolution transmission electron microscopy. Electron beam irradiation resulted in a decrease in the aspect ratio of Au NPs from ~ 1.4 to 1 with increase in irradiation time. The observed ellipsoidal-to-spherical shape transition of Au NPs has been ascribed mainly to the cumulative effects of electron beam induced heating, softening of silica matrix and radiation enhanced diffusion of knock-on displaced O and Si atoms, resulting in local stress relaxation.

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