Shankar Dutta; Ramjay Pal;Ratnamala Chatterjee
Abstract
This paper discussed about the integration issues of Pb (Zr0.52Ti0.48) O3 – BiFeO3 (PZT - BFO) multilayer thin film deposited on silicon substrate for possible application in future micro-electro-mechanical system (MEMS) devices. The PZT - BFO multilayer thin film is deposited on silicon wafer ...
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This paper discussed about the integration issues of Pb (Zr0.52Ti0.48) O3 – BiFeO3 (PZT - BFO) multilayer thin film deposited on silicon substrate for possible application in future micro-electro-mechanical system (MEMS) devices. The PZT - BFO multilayer thin film is deposited on silicon wafer by sol-gel technique. The multilayer film is annealed at 650 °C in air for 60 min. The deposited multilayer film is found to be polycrystalline in nature. The PZT-BFO multilayer exhibited room temperature multiferroic properties (remnant polarization of 37 mC/ cm 2 and remnant magnetization of 3.1 emu / cm 3 ). To fabricate the PZT - BFO multiferroic cantilever structures, a two-mask process flow is developed. Etch rates of the PZT - BFO multilayer (180 nm/ min), ZrO2 buffer layer (35 nm/ min) and SiO2 layer (350 nm/ min) are optimized in CHF3 plasma. The multiferroic cantilever structures are released by isotropic etching of silicon using SF6 plasma. Bending and cracks are observed in the released cantilever structures due to the generation of residual stress in the multilayer thin film. Effect of residual stress on the PZT - BFO cantilever structure is also verified by simulation.
M. Esthaku Peter; P. Ramasamy
Abstract
Single crystals of triglycinium calcium nitrate, a semiorganic nonlinear optical (NLO) material, have been grown by slow solvent evaporation technique at room temperature. The size of the grown crystal is up to the dimension of 29×19×5 mm 3 . The structure of the crystal was analyzed by single ...
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Single crystals of triglycinium calcium nitrate, a semiorganic nonlinear optical (NLO) material, have been grown by slow solvent evaporation technique at room temperature. The size of the grown crystal is up to the dimension of 29×19×5 mm 3 . The structure of the crystal was analyzed by single crystal X-ray diffraction and the functional groups present in the sample were identified by FTIR spectral analysis in the range 4000-450 cm -1 . The UV-vis-NIR studies was undertaken to find the transmittance in the ultraviolet and visible region. The efficiency of second harmonic generation was analyzed by Kurtz-Perry powder technique and compared with standard KDP crystal. Thermogravimetric and differential thermal analysis have been performed to determine the thermal stability of the crystal. Dielectric properties such as dielectric constant and dielectric loss were studied at various temperatures and frequencies. Vickers microhardness testing was carried out on the as-grown crystal surface to reveal the mechanical properties of the crystal. Etching studies were made on the as grown crystal to analyze the structural imperfection of the crystal.
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