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Establishment Of Optimized Metallic Contacts On Silicon For Thermoelectric Applications   

Omar Abbes; Amer Melhem; Chantal Boulmer-Leborgne; Nadjib Semmar

Volume 6, Issue 11 , November 2015, , Pages 961-964

https://doi.org/10.5185/amlett.2015.6138

Abstract
  This communication describes the development of optimized metallic contacts on Si for thermoelectric applications. Thin solid films of Ni and Pt with the same thickness, were deposited on Si substrates. Two silicides were formed in a vacuum chamber and were studied. The EDX spectroscopy and electron ...  Read More