In the present work, cupric oxide (CuO) nanoparticle (NP) thin films were synthesized on glass by combination of sputter and chemical bath deposition technique. The CuO seeds were deposited by using radio frequency (RF) sputter technique at room temperature. CuO nanoparticles were prepared by chemical bath deposition. Effect of solute molar concentration (0.02 to 0.04M) and annealing temperature (at 400°C) on nanoparticles size and distribution were studied. The average size of nanoparticles is small in lower molar concentration, which is restructured after annealing to form dense film with relative smaller size nanoparticles. The work opens up new route to synthesize CuO nanorticle thin films for different applications.