Authors
Abstract
Generation of self organized nanoripple patterns on Si (100) single crystal surface using low energy Ar ion beam erosion has been studied. Ion energy and ion fluence dependence of the ripple pattern is in general agreement with the reported works. However, it is found that at relatively low fluences, the pattern formation depends upon the direction of the projection of the ion beam on Si surface with respect to its crystallographic orientation. Ripple formation is facilitated if the projection of ion beam on the sample surface is along (010) direction as against (011) direction. For higher ion fluence, when the Si surface layer is fully amorphized, pattern formation is independent of the azimuthal direction of the ion beam.
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