The properties of materials at the nano scale critically depend on their size and shape, thus opening a new exciting area of nanotechnology. Its main thrust is to create novel functional materials with their unique physical, chemical and biological properties. The field of engineering of materials with desired properties is seeing a revolution as it becomes feasible to fabricate nanoscale building blocks having precisely controlled size and composition. Ionizing radiation (photon, electron and ion beams) have provided immense possibilities for engineering the desired properties of materials and are now emerging as indispensible tools for mesoscopic structuring [1-5]. The field of materials engineering through nano approach has demonstrated tremendous potential in the development of different types of novel materials with new characteristics and functions. The aim of nano engineering with photon, electron and ion beams is to control the nano scale structure of materials to optimize their properties and functionality.