Keywords : electrothermal actuator
Advanced Materials Letters,
2018, Volume 9, Issue 10, Pages 692-695
A novel three arm microgripper design is presented in this paper. It is a SU-8 based design with integrated microheaters. It is composed of three microactuators: two are based on a design for bi-directional beam deflection and the other is a tri-directional actuator. The actuators are simulated and analyzed using COMSOL Multiphysics tool. The first actuator has displacement of about 12 μm and 35 μm respectively when heaters h1 and h2 are used in operation and the heater temperature is about 200°C. The second actuator has a displacement of about 12 μm in all three directions. This microgripper is flexible and can be used to grasp a wide range of sizes of micro-particles. In addition, it has more freedoms of control by using the different combinations of the 8 embedded microheaters for electrothermal actuation.