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 Silicon Nitride Thin Films Deposited By Reactive Gas-timing Magnetron Sputtering For Protective Coating Applications

N. Khemasiri; N. Paleeya; D. Sae-tang Phromyothin; M. Horprathum; A. Sungthong; J. Nukeaw; S. Pratontep

Volume 6, Issue 6 , June 2015, , Pages 554-559

http://dx.doi.org/10.5185/amlett.2015.SMS5

Abstract
  Silicon nitride is a promising alternative to carbon based materials for protective coatings, owing to its compatibility with existing silicon-based microfabrication. The complexity of the fabrication processes and contaminations hamper fine-tuning to obtain desirable coating properties. We have explored ...  Read More