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Variation In Mechanical Properties With Substrate Temperature Of SbTi Thin Film Deposited By RF Sputtering Technique

A. Rambabu; Anil Tumuluri; K.C. James Raju

Volume 5, Issue 5 , May 2014, , Pages 292-296

http://dx.doi.org/10.5185/amlett.2013.fdm.12

Abstract
  Nanoindentation technique has been used to determine the mechanical properties of bismuth layered structure ferroelectric thin films, which have been shown to be promising for MEMS based devices used in sensing, actuation and energy harvesting, especially at elevated temperatures. SBTi (SrBi4Ti4O15) ...  Read More