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Structural And Optical Study Of MeV Cobalt Ion Implanted Silicon

Pramita Mishra; Vanaraj Solanki; Ashutosh Rath; Soumee Chakraborty; Himanshu Lohani; Pratap K. Sahoo; Biju Raja Sekhar

Volume 5, Issue 12 , December 2014, , Pages 699-705

http://dx.doi.org/10.5185/amlett.2014.nib503

Abstract
  We report the optical tunability through defect states created in silicon by 1 MeV cobalt ion implantation at room temperature in the fluence range of 5 × 10 13 to 5 × 10 15 ions cm -2 . Atomic force microscopy studies reveal the surface nanostructures with maximum roughness of 0.9 nm at ...  Read More