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Growth Characteristics Of Glancing Angle Deposited (GLAD) Thin Films

Alireza Dolatshahi-Pirouz

Volume 5, Issue 11 , November 2014, , Pages 634-638

http://dx.doi.org/10.5185/amlett.2014.7591

Abstract
  This paper investigates the effect of surface diffusion and re-emission on the surface morphology of GLAD thin films. This was done through GLAD of platinum and tantalum at two different surface temperatures (293 K and 153 K). The effect of shadowing during the thin film growth was examined by utilizing ...  Read More