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Synthesis Of Nanostructured Tungsten Oxide By Thermal Oxidation Method And Its Integration In Sensor For VOCs Detection

Bhagaban Behera; Sudhir Chandra

Volume 7, Issue 9 , September 2016, , Pages 697-701

http://dx.doi.org/10.5185/amlett.2016.6101

Abstract
  In this study, tungsten oxide nanorods have been grown by thermal oxidation of tungsten film deposited on oxidized silicon substrates for gas sensing applications. Tungsten film of thickness 100 nm was deposited by sputtering method and thermally oxidized in atmospheric ambient to synthesize nanorods. ...  Read More