TY - JOUR ID - 15010 TI - Deflection behavior of focused-ion-beam deposited carbon nanocantilever and overhung structures JO - Advanced Materials Letters JA - AML LA - en SN - 0976-3961 AU - K Sarswat, Prashant AU - Jagannathan, Madhusudan AD - Y1 - 2017 PY - 2017 VL - 8 IS - 4 SP - 324 EP - 330 KW - Focused ion beam KW - CVD KW - MEMS KW - NEMS KW - cantilever DO - 10.5185/amlett.2017.6889 N2 - Elastic properties of nanostructures are crucial for the adequate design and long term use of nano/micro-electro-mechanical system (NEMS/MEMS) as well as their utility in nanoindentation. Carbon nanostructures were fabricated by focused ion beam (FIB) assisted deposition and milling using Naphthalene (C10H8) as a precursor gas. Cantilevers of size 3-10 µm were fabricated and their elastic properties were monitored. An end point load was applied by successive deposition of Pt or carbon in a form of vertical column. Euler–Bernoulli beam theory was applied to examine the mechanical properties of the cantilever. It has been observed that expected deflection of the carbon nano-cantilever is significantly different compared to most of the reported micro or nano-sized carbon or diamond structures. Initial investigation of such a discrepancy suggests that Ga implantation and presence of core-shell type structure are the main causes of altered mechanical properties.  UR - https://aml.iaamonline.org/article_15010.html L1 - https://aml.iaamonline.org/article_15010_d5b4c0a1f69b0d06359cd716ccebb4b1.pdf ER -