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Azimuthal Angle Dependence Of Nanoripple Formation On Si(100) By Low Energy Ion Erosion

Sarathlal K.V; ;Ajay Gupta; Satish Potdar; Mohan Gangrade; V. Ganesan; and Ajay Gupta

Volume 4, Issue 6 , June 2013, , Pages 398-401

https://doi.org/10.5185/amlett.2012.ib.102

Abstract
  Generation of self organized nanoripple patterns on Si (100) single crystal surface using low energy Ar ion beam erosion has been studied. Ion energy and ion fluence dependence of the ripple pattern is in general agreement with the reported works. However, it is found that at relatively low fluences, ...  Read More