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Deposition Of PZT Thin Films With (001), (110), and (111) Crystallographic Orientations And Their transverse Piezoelectric Characteristics

D. Ambika; V. Kumar; K. Tomioka; Isaku Kanno

Volume 3, Issue 2 , April 2012, , Pages 102-106

https://doi.org/10.5185/amlett.2011.7281

Abstract
  Pb(ZrxTi1-x)O3 [PZT] thin films of morphotropic phase boundary (MPB) composition having {001}, {110}, and {111}-orientations were fabricated on silicon substrates (111)Pt/Ti/SiO2/Si using a metal organic decomposition spin-coating technique. The influence of crystallographic orientation on the transverse ...  Read More