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Coatings for sensing and protection in silicon sensors  

PJ French

Volume 9, Issue 6 , June 2018, , Pages 392-399

https://doi.org/10.5185/amlett.2018.1892

Abstract
  Silicon is an excellent material for sensing. Sensors for all signal domains can be realised, and in many cases, integrated with read-out electronics. However, in some applications an addition layer may be required for sensing and/or to protect the silicon device. Piezoelectric, polymers or magneto resistive ...  Read More

Coatings for sensing and protection in silicon sensors