Lin Li; Shibing Tian; Ruhao Pan; Chao Wang; Chi Sun; Junjie Li; Changzhi Gu
Abstract
The uniformity in temperature-field of the hot filament chemical vapor deposition (HFCVD) system is of great importance since it is a critical parameter that determines the quality of the deposited films. In fact, the temperature-field is mainly filament distribution dependent. In conventional analysis ...
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The uniformity in temperature-field of the hot filament chemical vapor deposition (HFCVD) system is of great importance since it is a critical parameter that determines the quality of the deposited films. In fact, the temperature-field is mainly filament distribution dependent. In conventional analysis method, the filament array usually has an equal-space distribution, which leads to a remarkable edge effect and consequently unable to obtain large area uniformity in temperature-field in HFCVD for high-quality thin film deposition. Here, we proposed theoretically an asymmetrical filament distribution to reduce the edge-effect of temperature field. The adjacent filament distance was optimized by using numerical simulation based on heat-transfer theory. Based the optimized condition, temperature difference as low as 13 K between the center and edge region of the filament arrays can be achieved in 100-mm substrate, which is only one tenth of the temperature difference of that in the case that the filaments were evenly distributed. Thus unequal-space distribution can be employed to enhance the uniformity in temperature field of the HFVCD system in favor of the growth of high quality thin films in large area.