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Effect Of Xe Dilution On Structural, Electrical And Optical Properties Of Nanocrystalline Si Films Deposited By HW-CVD Method

Vaishali S. Waman; Azam H. Mayabadi; Mahesh M. Kamble; Bharat B. Gabhale; Adinath M. Funde; Vasant G. Sathe; Habib M. Pathan; Sandesh R. Jadkar

Volume 6, Issue 9 , September 2015, , Pages 795-802

https://doi.org/10.5185/amlett.2015.5902

Abstract
  We investigated the effect of Xe dilution of silane on structural, optical and electrical properties of nanocrystalline Si films deposited by HW-CVD. With increase in Xe dilution of silane nanocrystalline-to-amorphous transition or amorphization has been observed in nanocrystalline Si films. The amorphization ...  Read More