Volume 15 (2024)
Volume 14 (2023)
Volume 13 (2022)
Volume 12 (2021)
Volume 11 (2020)
Volume 10 (2019)
Volume 9 (2018)
Volume 8 (2017)
Volume 7 (2016)
Volume 6 (2015)
Volume 5 (2014)
Volume 4 (2013)
Volume 3 ( 2012)
Volume 2 (2011)
Volume 1 (2010)
Fabrication of Y2O3 coatings by cold-spray

Lingyan Kong; Rifei Han; Yang Yang; Jiayi LI; Tianying Xiong; Tiefan Li

Volume 10, Issue 3 , March 2019, , Pages 189-192

https://doi.org/10.5185/amlett.2019.2188

Abstract
  As a candidate material against plasma etching, yttrium oxide has been coated onto etching chamber by plasma spray technique. However, the plasma spray technique introduces undesirable coating properties such as porous structure and deleterious thermal effects. To reduce the disadvantage of thermal impact, ...  Read More

Fabrication of Y<sub>2</sub>O<sub>3</sub> coatings by cold-spray