Volume 15 (2024)
Volume 14 (2023)
Volume 13 (2022)
Volume 12 (2021)
Volume 11 (2020)
Volume 10 (2019)
Volume 9 (2018)
Volume 8 (2017)
Volume 7 (2016)
Volume 6 (2015)
Volume 5 (2014)
Volume 4 (2013)
Volume 3 ( 2012)
Volume 2 (2011)
Volume 1 (2010)
Effect of residual stress in Pb (Zr0.52Ti0.48) O3 – BiFeO3 multilayer cantilever structure

Shankar Dutta; Ramjay Pal;Ratnamala Chatterjee

Volume 9, Issue 3 , March 2018, , Pages 169-174

https://doi.org/10.5185/amlett.2018.6973

Abstract
  This paper discussed about the integration issues of Pb (Zr0.52Ti0.48) O3 – BiFeO3 (PZT - BFO) multilayer thin film deposited on silicon substrate for possible application in future micro-electro-mechanical system (MEMS) devices. The PZT - BFO multilayer thin film is deposited on silicon wafer ...  Read More

Effect of residual stress in Pb (Zr0.52Ti0.48) O3 – BiFeO3 multilayer cantilever structure