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Nanocrystalline Diamond Films As A Protective Coating For Implantable Bio- Devices

Rishi Sharma; Neelima Sharma; Rahul Parmar; Vijay Chatterjee; Anoop Kumar; N. Woehrl; V. Buck; P. K. Barhai

Volume 7, Issue 11 , November 2016, , Pages 903-909

https://doi.org/10.5185/amlett.2016.6050

Abstract
  Nanocrystalline diamond (NCD) films are deposited on silicon substrates using Microwave Plasma Enhanced Chemical Vapor Deposition technique with the variation of microwave power from 800 W to 1800 W at 200 mbar for 5 hrs. Methane is used as a precursor along with argon and hydrogen as carriers for deposition. ...  Read More