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Synthesis And Thermal Analysis Of Yttrium Metallorganic Complexes For Evaluation As Chemical Vapor Deposition Precursors

J. Selvakumar; K. S. Nagaraja

Volume 3, Issue 2 , April 2012, , Pages 130-135

https://doi.org/10.5185/amlett.2011.7293

Abstract
  The thermal stability and suitability of synthesized yttrium metallorganic complexes were studied for chemical vapor deposition use by thermogravimetric analyses. The phase purity of the synthesized complexes was analyzed by powder X-ray diffraction and mass spectral techniques. The equilibrium vapor ...  Read More